Micromechanical device e.g. acceleration sensor used in e.g. automotive industry, has hooking structure whose structural elements are interlocked with each other, according to displacement of movable mass which is suspended movably

摘要

The micromechanical device (101) comprises a substrate (100), and a spring structure (130) over which a movable mass (120) is suspended movably with respect to the substrate. A hooking structure (140) is arranged over or outside the spring structure. The structural elements (141,142) of the hooking structure are interlocked with each other, according to the displacement of the movable mass. The elastic properties of the structural elements of the hooking structure are varied. The spring structure is provided in U-shaped or S-shaped.