Method for controlling machining of workpiece, involves allowing passage of energy machining beam and/or light beam through lens, to move incidence point of working beam and illumination beam on workpiece

摘要

The method involves allowing passage of energy machining beam (14) and/or a light beam through a lens (18), to move a point (A) of incidence of the working beam and illumination beam on the workpiece, so that the illumination field is moved perpendicular to optical axis (O). An independent claim is included for device for machining workpiece with high energy machining beam.