A vapor deposition apparatus and method for continuously depositing a thin film layer on a substrate

摘要

Apparatus (100) and a process for vapor deposition of a sublimated source material as a thin film are provided on a photovoltaic (PV) module substrate (14). The device (100) contains at least one receptacle (116) arranged in a deposition head (110). Each receptacle (116) is adapted to receive granular source material (117). A heating system is arranged to heat the receptacle (s) (116) for sublimating the source material (117). A substantially vertical distribution plate (152) is disposed between the receptacle (s) (116) and a substrate (14) transported by the device (100). The distribution plate (152) is positioned at a defined distance from a vertical transport plane of a deposition surface of the substrate (14). The distribution plate (152) has a pattern of passages therethrough that distributes the sublimated source material for deposition on the deposition surface of the substrate (14).