EDGE TREATMENT METHOD OF GLASS SUBSTRATE, EDGE TREATMENT DEVICE FOR GLASS SUBSTRATE, AND GLASS SUBSTRATE

摘要

PROBLEM TO BE SOLVED: To provide an edge treatment method of a glass substrate by which edges of the glass substrate can be properly treated even if the glass substrate has a small plate thickness.;SOLUTION: This edge treatment method of a glass substrate 7 is characterized in that: an edge of the glass substrate 7 is disposed between an upper counter electrode 2 and a lower counter electrode 3 under pressure close to atmospheric pressure and under an atmosphere containing a process gas and a plasma stabilizing gas, plasma is generated by applying high frequency power 8 between the upper counter electrode 2 and the lower counter electrode 3, and a reactive gas is generated from the process gas by the plasma to treat the edge of the glass substrate 7.;COPYRIGHT: (C)2013,JPO&INPIT