RAW MATERIAL FOR COBALT FILM FORMATION AND MANUFACTURING METHOD OF COBALT-CONTAINING THIN FILM USING THE RAW MATERIAL

摘要

PROBLEM TO BE SOLVED: To provide a cobalt compound suitable for manufacturing a cobalt-containing thin film, and a method for manufacturing the cobalt-containing thin film using a mixture of the cobalt compound.;SOLUTION: A raw material for cobalt film formation includes a bis (amide amino alkane) cobalt compound expressed by a general formula (1) (in the formula, R1 shows a straight-chain, branched or cyclic alkyl group of number of carbon atoms 1-6, and R2 and R3 may be the same or different from each other, and show a straight-chain or branched alkyl group of number of carbon atoms 1-3).;COPYRIGHT: (C)2013,JPO&INPIT