METHOD OF PRODUCING POLYMER THIN FILM HAVING MICROSTRUCTURE AND PATTERN SUBSTRATE

摘要

PROBLEM TO BE SOLVED: To provide a method for producing a polymer thin film having a pattern with coexisted regions each consisting of regular patterns having different periods on a substrate surface or a pattern having a distribution in periods of regular patterns, which is formed by a micro-phase separation of a polymer block copolymer.;SOLUTION: A method of producing a polymer thin film includes a step of arranging a polymer layer containing a polymer block copolymer composition on the surface of a substrate, and separating the micro-phase of the polymer layer. The substrate surface has patterns formed on a surface 1 and a surface 2 with different chemical characteristics. Moreover, a polymer mutually soluble into a first polymer chain or a second polymer chain, or a second polymer block copolymer is mixed in specific proportions with a polymer block copolymer in which the polymer block copolymer composition consists of a first polymer block chain and a second polymer block chain.;COPYRIGHT: (C)2013,JPO&INPIT