FILM THICKNESS MEASUREMENT METHOD, MEASUREMENT DEVICE, FILM THICKNESS CHANGE MEASUREMENT METHOD AND MEASUREMENT DEVICE

摘要

PROBLEM TO BE SOLVED: To provide a film thickness measurement method that can measure a film thickness of a coated film with high accuracy and in a short time.;SOLUTION: A method of irradiating a coated film 4 with light from a light source 1 and determining a thickness of the coated film 4 by detecting an intensity of interference light including reflection light from the coated film 4 comprises: a branch step of branching the light from the light source 1 into reference light and incident light to the coated film 4; an interference step of causing the reflection light from the coated film 4 and the reference light to be interfered with each other by adjusting an optical distance of the reference light; a detection step of detecting a plurality of intensity signals generated by the interference of the reflection light from the coated film 4 and the reference light; and a film thickness calculation step of calculating the thickness of the coated film 4 from an interval between adjacent peaks of a plurality of detected intensity signals. The coated film 4 may be an optical curing resin or an electron beam curing resin.;COPYRIGHT: (C)2014,JPO&INPIT