TRANSPARENT CONDUCTIVE FILM, SUBSTRATE WITH TRANSPARENT CONDUCTIVE FILM, IPS LIQUID CRYSTAL CELL, CAPACITANCE TYPE TOUCH PANEL, AND METHOD FOR MANUFACTURING SUBSTRATE WITH TRANSPARENT CONDUCTIVE FILM

摘要

PROBLEM TO BE SOLVED: To provide a transparent conductive film, a substrate with the transparent conductive film, an IPS liquid crystal cell, a capacitance type touch panel, and a method for manufacturing the substrate with the transparent conductive film, by which high resistance in the level of several hundreds M/sq. is stably obtained and a conductive film having less aging deterioration and high transmittance can also be acquired.SOLUTION: The transparent conductive film 3 is formed over a glass substrate, and is composed mainly of indium tin oxide (ITO) and includes 7.2 to 11.2 at% of silicon. The specific resistance is in the level of 100 to 103 cm, and the transmittance at the wavelength of 550 nm is 98% or more.