ELECTROSTATIC TYPE CHARGED PARTICLE BEAM LENS AND CHARGED PARTICLE BEAM DEVICE

摘要

PROBLEM TO BE SOLVED: To provide a cleaning processing method of deposit inside a lens.SOLUTION: In an electrostatic charged particle beam lens having a plurality of lens electrodes, the charged particle beam lens includes a first electrode and a second electrode to be arranged by being separated from each other by an interval regulation member in an optical axis direction and has a gap surrounded by the first electrode 1a, the second electrode 1b, and the interval regulation member. The first electrode and the second electrode have a first through hole 2 through which charged particle beams pass, and at least the second electrode has a second through hole 3 through which the charged particle beams do not pass. The charged particle beam lens has a structure in which the first through hole and the second through hole are connected to the gap, respectively, and is constituted so that the total amount of exhaust conductance of the first electrode becomes smaller than the total amount of exhaust conductance to communicate to the outside of the lens electrodes through the through hole provided to the second electrode from the gap.