CRYOPUMP CONTROL APPARATUS, CRYOPUMP SYSTEM, AND METHOD FOR DETERMINING VACUUM RETENTION OF CRYOPUMP

摘要

PROBLEM TO BE SOLVED: To provide a cryopump control apparatus capable of properly inspecting a vacuum retention state of a cryopump, a cryopump system, and a method of determining vacuum retention of the cryopump.;SOLUTION: In this cryopump control apparatus 80 controlling an evacuation process of a cryopump that includes a cryopanel 48 which cools and thus condenses or adsorbs gas, and a pump container 36 which contains the cryopanel 48, a pressure control unit 94 stops vacuum pumping when detecting that a pressure in the pump container 36 decreases to a reference pressure. A vacuum retention determination unit 92 determines whether a difference between pressure values in the pump container 36 measured at first measurement time and at second measurement time is within an allowable range of pressure change. The first measurement time is determined by adding correction time relating to an operating delay of vacuum pumping to a time point when the pressure in the pump container 36 is detected to be decreased to the reference pressure.;COPYRIGHT: (C)2013,JPO&INPIT