Being the probe in order to measure the probe in order to measure the property of excited electric current of the plasma

摘要

This invention regards the probe in order to measure the electric quality of excited electric current of the plasma. The particular probe the inside conductor (21) and the outer part conductor (22) the conductive line which is included (20) to be installed on, the electric current sensor (41) and the voltage sensor (42) include, the said electric current sensor, the said conductor (22) in the groove which was formed to one principal circles of the said conductor in order to form the detour for the electric current which flows, (410) with, to include with the point in order to measure the voltage with the ground and the point of the said groove which are connected to the said conductor, with that, as for the said electric current sensor, the said excited electric currentStrength (I _plasma) the voltage which is proportionate to primary time differential (V1) it is possible to measure. The said voltage sensor (42), voltage of the said excited electric current (V _plasma) the voltage which is proportionate to primary time differential (V2) it is the shunt sensor which can measure. In addition as for this invention, it regards the plasma reactor which possesses the probe of the above-mentioned type. Selective figure Figure 2