of;
Mechanical;
Design;
Engineering,;
Chosun;
University,;
Gwangju;
501-759,;
Korea;
of;
Nano;
Fusion;
Technology,;
Pusan;
National;
University,;
Miryang;
627-706,;
Korea;
of;
Nano-mechatronics;
Engineering,;
Pusan;
National;
University,;
Miryang;
627-706,;
Korea;
测量探头; 纳米机械; 纳米探针; 电容位移传感器; 便携式; 表面形貌测量; 接触式测头; 刮擦;