首页>
外国专利>
The electric charge corpuscular ray device and the sample observation technique null charged particle line source which
The electric charge corpuscular ray device and the sample observation technique null charged particle line source which
展开▼
机译:电荷体射线装置及样品观察技术将带电粒子线源作零
展开▼
页面导航
摘要
著录项
相似文献
摘要
PROBLEM TO BE SOLVED: To obtain such images that can make selection of each contrast or color a diffraction contrast part to clearly display it, by distinguishing diffraction contrast and Z contrast from dark-field signal images formed by dark-field signal particles transmitting inside a sample in dispersion, in a charged particle beam device.;SOLUTION: An image processing device with dark-field detectors divided into a plurality of numbers and memories for making the detectors store images is provided that can recognize diffraction contrast detected in a specific direction from a plurality of sheets of images obtained from the divided detectors as well as Z contrast scattered in a uniform direction, and make selection of each contrast as well as clearly display diffraction contrast parts by coloring the same.;COPYRIGHT: (C)2010,JPO&INPIT
展开▼