Method and device for estimate preventive maintenance of processing chamber

摘要

SolutionsMethod in order to assess the healthy state of the processing chamber is offered. Method includes the fact that reshipi is executed. As for method, in addition, the fact that while executing reshipi the processing data is received from set of the sensor is included. Method includes the fact that the processing data is analyzed furthermore, making use of the set of the multivariate forecasting model. Method furthermore furthermore, includes the fact that set of component worn data value is formed. Method furthermore furthermore, includes the fact that set of component worn data value is compared with the set of the useful life threshold range. Method furthermore, includes the fact that warning is formed when set of component worn data value is outside set of the useful life threshold range. Selective figure Figure 1