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Graphene sheet and direct transfer method of graphene using the same, and low-temperature fabrication method of graphene
Graphene sheet and direct transfer method of graphene using the same, and low-temperature fabrication method of graphene
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机译:石墨烯片和使用该石墨烯片的直接转移方法以及石墨烯的低温制造方法
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摘要
The present invention relates to a method for forming graphene at a low temperature, to a method for direct transfer of graphene using same, and to a graphene sheet. The method for forming graphene at a low temperature comprises supplying a carbon-source-containing gas to a metal catalyst layer for graphene growth formed on a substrate, and forming graphene at a low temperature of 500° C. or less by means of inductively coupled plasma-chemical vapor deposition (ICP-CVD).
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