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Graphene sheet and direct transfer method of graphene using the same, and low-temperature fabrication method of graphene

机译:石墨烯片和使用该石墨烯片的直接转移方法以及石墨烯的低温制造方法

摘要

The present invention relates to a method for forming graphene at a low temperature, to a method for direct transfer of graphene using same, and to a graphene sheet. The method for forming graphene at a low temperature comprises supplying a carbon-source-containing gas to a metal catalyst layer for graphene growth formed on a substrate, and forming graphene at a low temperature of 500° C. or less by means of inductively coupled plasma-chemical vapor deposition (ICP-CVD).
机译:本发明涉及在低温下形成石墨烯的方法,使用该石墨烯直接转移石墨烯的方法以及石墨烯片。低温形成石墨烯的方法包括将含碳源的气体供应到形成在基板上的用于石墨烯生长的金属催化剂层,以及通过感应耦合在小于等于500℃的低温下形成石墨烯。等离子化学气相沉积(ICP-CVD)。

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