WORK MEASURING APPARATUS, WORK CARRIER TABLE, WORK MEASURING METHOD, AND METHOD FOR MANUFACTURING ELECTRONIC COMPONENT

摘要

PROBLEM TO BE SOLVED: To provide an apparatus and a method capable of preventing generation of damage on an external electrode due to probe depression when measuring electric characteristics of a chip type electronic component while carrying the electronic component.;SOLUTION: A work measuring apparatus includes a table base 1 and a carrier table 2 rotatably installed on the table base and including a first layer 2a formed on the opposite side of the table base and a second layer 2b formed the table base 1 side. A plurality of work storage holes 4 for storing respective works W are formed through the first layer and through-holes 9 are formed in the second layer through the second layer correspondingly to the respective work storage holes. A one-side electrode Wa of the work stored in each work storage hole is exposed from the first layer side of the work storage hole and the other-side electrode Wb is abutted on the through-hole of the second layer. A first probe 60 abutting on the one-side external electrode of the work stored in the work storage hole is arranged on the first layer side of the carrier table and a second probe 61 abutting on the through-hole of the second layer is arranged in the table base.;COPYRIGHT: (C)2013,JPO&INPIT