Layout design program, recording medium storing the program, layout design apparatus, and layout design method

摘要

A layout design apparatus that limits the maximum wiring density and the maximum edge length of partial regions when determining wiring layout. After determining the wiring layout, the layout design apparatus inserts a dummy into a partial region having a low wiring density and thereby, the minimum wiring density and the minimum edge length of the partial regions are limited. Thus, the respective wiring densities and respective edge lengths of the partial regions are constrained within a constant range and irregularities in the substrate surface after polishing can be suppressed.