DEFECT INSPECTION METHOD AND DEFECT INSPECTION DEVICE FOR ORGANIC EL PANEL

摘要

PROBLEM TO BE SOLVED: To provide a defect inspection method capable of detecting a defect of an organic layer just after being formed when defect inspection of an organic EL panel is performed.;SOLUTION: The defect inspection method comprises: obliquely disposing light source 2 for irradiating an organic layer 12 with inspection light 2A, to a substrate 10; disposing imaging means 3 for imaging the organic layer 12 at a position where the inspection light 2A is not incident; detecting light emitted from the organic layer 12 by the irradiation of the inspection light 2A, by the imaging means 3; and inspecting a defect on the basis of an imaging signal relating to the organic layer 12 obtained by the imaging means 3.;COPYRIGHT: (C)2013,JPO&INPIT