CREATION METHOD OF TRANSPARENT CONDUCTIVE FILM, AND TRANSPARENT CONDUCTIVE FILM MATERIAL

摘要

PROBLEM TO BE SOLVED: To provide a manufacturing method of a transparent conductive film having lower resistance as compared with a known NTO film, and to provide a transparent conductive film material having lower resistance as compared with a known NTO film.;SOLUTION: A creation method of a transparent conductive film is characterized in that a transparent conductive zinc oxide film and an NTO film are formed on a glass substrate in this order and then to be subjected to annealing treatment. The transparent conductive zinc oxide film is to be GZO.;COPYRIGHT: (C)2013,JPO&INPIT