Transparent conductive film, transparent conductive substrate using this transparent conductive film, transparent conductive film, near-infrared shielding filter, and method for producing this transparent conductive film

摘要

PPROBLEM TO BE SOLVED: To provide a transparent conductive membrane constituted of an oxide membrane and a metal membrane which is high in transmissivity of a visible range, superior in conductivity and cutoff characteristics of a near-infrared region, and superior in humidity resistance and chemical resistance. PSOLUTION: The transparent conductive membrane is constituted of an amorphous oxide membrane (a-GIO membrane) mainly constituted of gallium, indium, and oxygen, and the metal membrane (Me membrane) composed of silver or an alloy having silver as the main component, and has a three-layered structure pinching the metal membrane by the amorphous oxide membrane. Then, a multi-layered membrane including this transparent conductive membrane is installed on a transparent substrate, and a transparent conductive substrate, a transparent conductive film, and a near-infrared cutoff filter are fabricated. PCOPYRIGHT: (C)2008,JPO&INPIT