PRE-SHRINK SHAPE ESTIMATION METHOD AND CD-SEM APPARATUS

摘要

PROBLEM TO BE SOLVED: To highly accurately estimate a shape and a dimension before shrink when measuring a length of resist to be shrunk by electron beam irradiation by CD-SEM.;SOLUTION: A shrink database including pre-electron-beam-irradiation cross-sectional shape data, a cross-sectional shape data group and a CD-SEM image data group obtained under various electron beam irradiation conditions, and models based on them is prepared for various patterns, a CD-SEM image of a resist pattern to be measured is acquired (S102), the CD-SEM image and the shrink database are collated (S103), and the shape and the dimension before the shrink of the pattern to be measured are estimated and outputted (S104).;COPYRIGHT: (C)2013,JPO&INPIT