GAS-MIXING DEVICE AND GAS-MIXING SYSTEM

摘要

PROBLEM TO BE SOLVED: To provide a gas-mixing device with which the mixing ratio of gases can be changed in a short response time with high accuracy.;SOLUTION: The gas-mixing device 10 includes: a plurality of confluent valves 23 which are disposed in parallel to one another, to each of which oxygen and air are supplied and through which the oxygen and the air pass; a plurality of micropumps 24, each of which is disposed downstream of the confluent valve 23 one by one and sends out the mixture gas of the oxygen and the air passing through the confluent valves 23; and a confluent part 25 where the gases sent out from each of the micropumps 24 are confluent downstream of the micropumps 24.;COPYRIGHT: (C)2013,JPO&INPIT