Abnormal factor identification method and system, program for causing a computer to execute the abnormal factor identification method, and computer-readable recording medium recording the program

摘要

PPROBLEM TO BE SOLVED: To provide a fault factor identification method which can identify fault factors with precision even when a large scale process data obtained in a complicated very long process like a production process of semiconductor products is made to be an object. PSOLUTION: At least one amount of characteristics expressing the characteristics of a process data is extracted from a process data group (S5). The process data group is expressed by converting to a space of the amount of characteristics defined by representing the amount of characteristics as an axis (S6, S7). In the space of the amount of characteristics, among the process data groups about defective products, products grouped as having a predetermined relevance are classified into an identical group (S8). By the every classified group, in the space of the amount of characteristics, the amount of characteristics contributing the distance from a reference point to the point where the process data expresses about the each defective product is extracted (S9). Based on the extracted amount of characteristics, the fault factor is identified. PCOPYRIGHT: (C)2009,JPO&INPIT