DEFECT ANALYZING METHOD, DEFECT ANALYZING DEVICE AND DEFECT ANALYZING PROGRAM FOR SEMICONDUCTOR DEVICES

摘要

PROBLEM TO BE SOLVED: To provide a defect analyzing technique for semiconductor devices that enables the analysis success rate to be enhanced and the time taken by the analysis to be shortened.;SOLUTION: One of specific wiring lines that is presumed to be short-circuited is specified (S103); adjoining wiring lines presumed to be partners to the short circuiting are extracted (S104); a different voltage time zone in which the voltage state (logic state) differs between the two wiring lines is calculated (S107); and, by investigating the frequency of light emitting phenomena occurring in the different voltage time zone, the particular one of the adjoining wiring lines which is the partner to the short circuiting is definitely identified to the one of specific wiring lines in a short period of time.;COPYRIGHT: (C)2013,JPO&INPIT