A method for forming a conductive oxide film having a low contact resistance.

摘要

PPROBLEM TO BE SOLVED: To provide a formation method of a conductive oxide film with low contact resistance on the surface of a plate, a porous body, or a corrosion resistant metal base body such as a corrosion resistant metal non-woven fabric, made of Ti, Ni, Cu, Fe, Al, Ta, Zr or an alloy of these. PSOLUTION: A conductive oxide film containing at least one kind out of Pt, Ir, Ru, Pd, Ti, Ta, Zr, Co, Sn, In, Zn, and Re is formed on the surface of a corrosion resistant metal plate, a corrosion resistant metal porous body having independent bubbles, a corrosion resistant metal porous body having continuous pores opened on the surface and continuing to the inside pores, or a base body consisting of corrosion resistant metal non-woven fabric, made of Ti, Ni, Cu, Fe, Al, Ta, Zr or an alloy of these, and then, this is heat treated under non-oxidizing atmosphere. PCOPYRIGHT: (C)2008,JPO&INPIT