How to create this glass Dew terrorism hexyl-doped quartz glass, as well as the lithography system and an optical member having this glass

摘要

OD-doped synthetic silica glass that can be used for optical elements for use in the lithographic shorter than about 300nm is included in the disclosure. OD-doped synthetic silica glass was found to have a polarization-induced birefringence value is considerably smaller than the no-OD-doped quartz glass of the same degree of OH concentration. Lithography system comprising an optical member such optical member and an OD-doped synthetic quartz glass, glass from such are also disclosed. From extremely low polarization-induced birefringence value at about 193nm, glass is particularly suitable for immersion lithography system.