Deuteroxyl-doped quartz glass, optical component comprising the glass and lithography system, and method of making the glass

摘要

PROBLEM TO BE SOLVED: To provide a synthetic silica material having a low level of polarization-induced birefringence, a low level of light-induced wavefront distortion, a high level of initial internal transmission, and method for making the same.SOLUTION: The disclosure includes OD-doped synthetic silica glass usable in optical elements for use in lithography at short wavelengths below about 300 nm. The OD-doped synthetic silica glass is found to have significantly lower polarization-induced birefringence value than non-OD-doped silica glass with comparable concentration of OH. Also an optical member comprising such glass and lithographic systems including such optical member are disclosed. The glass is particularly suitable for immersion lithographic systems by virtue of the exceptionally low polarization-induced birefringence values at about 193 nm.