Bipolar impulse power source and this bipolar impulse power source the multiple bases jointing in parallel, to have with

摘要

PROBLEM TO BE SOLVED: To provide a bipolar pulsed supply for supplying power like bipolar pulse at a predetermined frequency to a pair of electrodes contacting plasma, which reduces switching loss of switching elements of a bridge circuit and achieves high durability without using a high-function switching element.;SOLUTION: The bipolar power supply includes a bridge circuit 22 comprising switching elements SW1-SW4 connected to positive and negative output terminals from a DC power supply source 1, and a control means for controlling switching between ON-OFF of each of the switching elements of the bridge circuit. A switching element SW0 for output short circuit is provided between the positive and negative DC outputs from the DC power supply source and the control means switches each of the switching elements of the bridge circuit in a state of short circuit of the switching element for output short circuit.;COPYRIGHT: (C)2010,JPO&INPIT