BIPOLAR PULSE POWER SOURCE AND POWER SOURCE DEVICE FORMED BY CONNECTING A PLURALITY OF BIPOLAR PULSE POWER SOURCES IN PARALLEL

摘要

in the bipolar pair of electrodes in contact with the plasma for supplying electric power to form a bipolar pulse with a predetermined frequency a pulse power supply, the switching loss of the switching elements may be of the bridge circuit is reduced, so that high durability can be achieved without using a high-performance switching element. Bipolar pulse direct current power source is turned on in the power supply source (1) that is a switching element connected to the DC output terminal of the positive and negative from (SW1 to SW4) consisting of a bridge circuit 22, each switching element of the bridge circuit (ON), a control means for controlling the switching of the off (OFF). Installing a switching element (SW0) for the output of a short circuit between the positive and negative direct current output from the DC power supply and, in the short circuit state of the switching device for the output short circuit, the switching of each switching element of the bridge circuit by the control means and carried out.