Automatic recognition of optical periodic structures in integrated circuit design.

摘要

A method of finding an optically periodic structure in a cell layer of an integrated circuit design includes receiving as input a physical representation of a cell layer of an integrated circuit design, finding reference coordinates of a selected portion of the cell layer from the physical representation of a cell layer, selecting an initial element located nearest to the reference coordinates, and constructing a base structure that includes the initial element and a minimum number of elements in the physical representation of the cell layer wherein the base structure may be replicated at an X-offset and a Y-offset to fill the entire selected portion so that for each element in each replica of the base structure there is an identical element at identical coordinates in the physical representation of the cell layer.