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摘要

PROBLEM TO BE SOLVED: To provide an alignment system enabling measurement and modeling of an asymmetrical target, special design and/or delicate adjustment of a target geometry (geometric structure) in order to correct drawbacks of the conventional method.;SOLUTION: By forming one or more sub-targets on an alignment target, the alignment target is made to have a geometry design. An alignment system aligns one or all the plurality of sub-targets. An algorithm is used for characterizing process and calculating alignment of the alignment system.;COPYRIGHT: (C)2008,JPO&INPIT