Optical waveguide device, optical waveguide device for optical element mounting system, light element mounting method, and its program

摘要

PROBLEM TO BE SOLVED: To obtain an optical waveguide device etc., capable of improving mounting accuracy and productivity for correcting misalignment of an alignment marker caused by distortion due to a substrate stressed and distorted.;SOLUTION: The optical waveguide device includes an optical waveguide section 15, including a waveguide core 13 formed on a substrate 11, and an optical device 18 (LD) mounted on the substrate 11 to correspond to the optical waveguide section 15, both of which are coupled at a light end face and mounted by hybrid mounting. LD side alignment markers 18A and 18B are provided in both sides of an active line 25 in the optical device 18. Substrate side alignment markers 21A and 21B are provided at positions where centers thereof and those of the optical device side markers 18A, 18B are matched when the optical device 18 is mounted on the corresponding substrate 11. Reference markers 24A and 24B are formed so that the relative positional relationship with the waveguide core 13 on the substrate 11 becomes constant. Thus, a misalignment amount is detected.;COPYRIGHT: (C)2009,JPO&INPIT