Apparatus for producing a film forming method and a metal film with a heat-resistant resin film of a long heat-resistant resin film

摘要

PPROBLEM TO BE SOLVED: To provide an apparatus for producing heat-resistant resin film with metal film and the like which can reduce the occurrence of wrinkles due to elongation in a film width direction. PSOLUTION: The apparatus for producing heat-resistant resin film with metal film is provided with a conveyance mechanism which conveys a long-size heat-resistant resin film while causing the film to contact with the surface of a cylindrical roller 13 and a film-forming mechanism such as sputtering for forming a metal film on the film surface which is not in contact with the cylindrical roller, wherein the cylindrical roller has a plurality of periodical grooves 30 disposed in substantially parallel to the axial direction on the roller surface. Even when a large thermal load is applied to the film upon the formation of the metal film by the use of the apparatus, the cylindrical roller hardly slides in the machine direction of the film and easily slides in the width direction of the film and, therefore, the occurrence of wrinkles of the heat-resistant resin film can be reduced without causing troubles in the conveyance of the film. PCOPYRIGHT: (C)2011,JPO&INPIT