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Method for extracting a distribution of the stored charge in the semiconductor device
Method for extracting a distribution of the stored charge in the semiconductor device
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机译:提取半导体器件中存储电荷分布的方法
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摘要
The present invention discloses in a method to extract the spatial distribution of charge stored in a charge-trapping layer of a semiconductor device. The method comprises the steps of performing a first charge-pumping measurement on a device under test using a variation of the upper level of the pulse and performing a second charge-pumping measurement on this device using a variation of the lower level of the pulse. The data obtained is combined for extracting the spatial distribution. This is done by establishing a relation between a charge pumping current I cp and a calculated channel length L calc of the semiconductor device by reconstructing a spatial charge distribution from the charge pumping curves for multiple values of the charge pumping current I cp . From these multiple values of I cp the value for which the corresponding calculated channel length L calc is substantially equal to the effective channel length L eff of the semiconductor device, reconstructing the spatial charge distribution from the charge pumping curves using the value of l cp obtained in step e).
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