Method of manufacturing a thin film solar cell thin film deposition equipment, and thin film deposition method

摘要

This thin-film formation device (100) has a sprayer (4) for spraying a mist (9) onto a substrate (1), a cooling means for cooling a raw material solution (5) in the sprayer (4), and a heating unit (3) for heating the mist (9). The vertical distance Lb from the bottom end of the sprayer (4) to the top surface of the substrate (1) is 1/2 La to La, where La is the vertical distance from the top surface of the substrate (1) to the top end of the heating unit (3).