Electromagnetic field simulation method, electromagnetic field simulation apparatus, and semiconductor device manufacturing method

摘要

According to one embodiment, a method is disclosed for simulating an electromagnetic field. The method can set a first mesh on a calculation region provided based on a medium through which an electromagnetic wave propagates. The method can calculate an electromagnetic field distribution on the first mesh by a frequency region solution based on characteristic values of the medium allocated on the first mesh. The method can set a second mesh on the calculation region. The method can allocate the electromagnetic field distribution obtained by the frequency region solution to the second mesh. In addition, the method can update the electromagnetic field distribution allocated to the second mesh in a predetermined time unit by a time region solution.