Laser micromachining device and focus servo method for laser micromachining device

摘要

PPROBLEM TO BE SOLVED: To provide a laser micromachining apparatus and its focus servo method by which no focus servo slips out even in the presence of a difference in level or a gap in a border between a workpiece and a fixing device and by which machining accuracy of the workpiece can be maintained, in laser micromachining by irradiation of a machining laser beam on a plurality of workpieces mounted on the fixing device. PSOLUTION: The laser micromachining apparatus includes: a first focus servo means 110 for focusing a machining laser beam on the fixing device 10; a second focus servo means 116 for focusing the machining laser beam on the workpiece; a border detecting means for detecting the border or its proximity between the workpiece and the fixing device; and a focus servo switching means 102 for switching the first and the second focus servo means based on the detection of the border detecting means. PCOPYRIGHT: (C)2008,JPO&INPIT