The silicon anisotropic etching medicine composition null 4th class

摘要

PROBLEM TO BE SOLVED: To provide an etching agent composition in which silicon etching speed is high, and silicon etching process time is shortened while keeping etching property such as etching speed ratio by crystal surface, a smoothness of etching surface, an etching agent composite which can selectively process only silicon in anisotropic etching without etching aluminum or aluminum alloy often used for electrode or wiring material, and an etching method of silicon and electronic apparatus with the silicon substrate processed in its etching which use this etching agent composition.;SOLUTION: A silicon anisotropic etching agent composition characteristically contains alkali compound, reducing compound, and anticorrosive.;COPYRIGHT: (C)2007,JPO&INPIT