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Positive photoresist composition, the novolak type phenolic resin coating and the

机译:正性光刻胶组合物,酚醛清漆型酚醛树脂涂料和

摘要

An object of the present invention is to provide a positive photoresist composition having excellent developing properties and heat resistance and a coating film made from the composition. A positive photoresist composition includes 3 to 80 parts by mass of a novolac phenol resin (B) relative to 100 parts by mass of a cresol novolac resin (A). The novolac phenol resin (B) has a repeating structural unit represented by formula (1) [In the formula, R represents a hydrogen atom or a hydrocarbon group having 1 to 12 carbon atoms and X represents a structure (x1) represented by formula (2) (In the formula, R 1 , R 2 , and R 3 each independently represent a hydrogen atom or an alkyl group having 1 to 8 carbon atoms; m and n each independently represent an integer of 1 to 4; p represents an integer of 0 to 4; and t represents 1 or 2) or an aromatic hydrocarbon group (x2) other than the structure (x1)]. The content of the structure (x1) relative to the total number of the structure (x1) and the structure (x2) is 85% or more.
机译:本发明的目的是提供具有优异的显影性能和耐热性的正型光刻胶组合物以及由该组合物制成的涂膜。相对于100质量份的甲酚酚醛清漆树脂(A),正性光致抗蚀剂组合物包含3至80质量份的酚醛清漆酚醛树脂(B)。线型酚醛树脂(B)具有式(1)表示的重复结构单元。[式中,R表示氢原子或碳数1〜12的烃基,X表示式(x1)表示的结构(x1)。 2)(式中,R 1,R 2和R 3分别独立地表示氢原子或碳原子数1〜8的烷基; m和n分别独立地表示1〜4的整数; p表示整数。 0为4;且t表示1或2)或除结构(x1)以外的芳族烃基(x2)]。相对于结构(x1)和结构(x2)的总数,结构(x1)的含量为85%以上。

著录项

  • 公开/公告号JP5152447B2

    专利类型

  • 公开/公告日2013-02-27

    原文格式PDF

  • 申请/专利权人 DIC株式会社;

    申请/专利号JP20120543361

  • 发明设计人 今泉 規史;鹿毛 孝和;今田 知之;

    申请日2012-04-10

  • 分类号G03F7/023;C08G8/20;H01L21/027;

  • 国家 JP

  • 入库时间 2022-08-21 16:53:58

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