Being inspection manner of the substrate for perpendicular recording media which inspects the form of the substrate for perpendicular recording media which is used for the production of the perpendicular recording media which

摘要

PROBLEM TO BE SOLVED: To evaluate a surface shape of a substrate for a perpendicular magnetic recording medium using a more suitable index.;SOLUTION: In an inspection method of the substrate for the perpendicular magnetic recording medium, the shape of the substrate for the perpendicular magnetic recording medium used for manufacture of the perpendicular magnetic recording medium recording information by a perpendicular magnetic recording system is inspected. The inspection method of the substrate for the perpendicular magnetic recording medium includes a cross-sectional shape measuring step S202 for measuring a cross-sectional shape of the disk-like substrate whose principal surface is polished, a Fourier-transforming step S204 for transforming a waveform of the cross-sectional shape into a relation of a wavelength and intensity by Fourier-transforming the waveform of the cross-sectional shape measured in the cross-sectional shape measuring step S202 and a determination step S208 for determining the quality of the substrate based on the relation of the wavelength and the intensity obtained in the Fourier-transforming step S204.;COPYRIGHT: (C)2009,JPO&INPIT