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The OPC modeling construction mannered and mannered null optical proximity effect amendment which decides the process condition of the information processing equipment
The OPC modeling construction mannered and mannered null optical proximity effect amendment which decides the process condition of the information processing equipment
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机译:OPC建模构造的方式和方式,决定了信息处理设备的处理条件
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摘要
In a method and apparatus for quantitatively evaluating two-dimensional patterns, a reference coordinate system is set in order to convert pattern edge information (one-dimensional data) acquired by measurement using an existing critical dimension machine into coordinate data. Thus, a pattern is converted into coordinate information. Next, a function formula is determined from this coordinate information by approximate calculation and a pattern is represented by the mathematical expression y=f(x). Integrating y=f(x) in the reference coordinate used when calculating the coordinate data gives the area of the pattern, whereby it is possible to convert the coordinate data to two-dimensional data.
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