Foreign body polishing apparatus and polishing method of foreign body work surface

摘要

Captures the defects of the workpiece surface, to create information for correction, select the foreign matter must be corrected based on this information, identifying the foreign matter central Xa is the center of the foreign matter that has been selected, the foreign body center Xa from, I offset the center of the polishing head to the side opposite to the feeding direction of the polishing tape. Then, while feeding the polishing tape from the supply reel, it can be modified by polishing the foreign material of the work surface while wound by the winding reel, is pressed against a polishing head for polishing tape between the take-up reel and supply reel. By this, even if a foreign object or brittle quality hard foreign matter is adhered to the workpiece surface, so that it can efficiently correct polishing without deteriorating the quality.