Foreign body polishing apparatus and polishing method of foreign body work surface

摘要

Create a data for correction can catch defects of the workpiece surface, and to measure the height of the foreign matter must be corrected based on this information, the height was measured, polishing normal when the first reference below the process proceeds to step, the process proceeds to the temporary polishing process when the second reference is less than the first reference above, it is determined that it is not polished at the time of the second reference above. This temporary polishing step, a predetermined amount only by lowering the polishing head, and with feeding the polishing tape from the supply reel, while wound by the winding reel, is pressed against a polishing head for polishing tape between the take-up reel and supply reel The move to polishing normal when examined by grinding the foreign substance, that whether the change occurs in the height of the foreign matter, change occurs in the height, and not polished when there is no change in height. By this, so even when the foreign matter of high hardness and large size are adhered to the work surface and to prevent scuffing drag and breakage of the abrasive tape and, without reducing as much as possible throughput.