The processing tube which accommodates the baseplate support component which it supports production method of the baseplate

摘要

PROBLEM TO BE SOLVED: To improve a uniformity of a thickness of a thin film formed on a substrate.;SOLUTION: A substrate processing system is provided with: a processing tube accommodating a substrate support member which holds vertically laminated substrates at a predetermined pitch; a gas feeding unit which is extended in the direction of laminating the substrates in the processing tube and is provided with plural gas supply apertures; a gas discharge portion which is opened to the processing tube; a gas straightening vane which is provided in a space sandwiched between peripheries of the substrates held by the substrate support member and an inner wall of the processing tube and is extended in the circumference direction of the processing tube from the gas feeding unit and in the direction of laminating the substrates; and a gas stream regulation part provided in a space in the processing tube above the highest gas feeding aperture and the highest substrate and in a space in the processing tube below the lowest gas feeding aperture and the lowest substrate.;COPYRIGHT: (C)2009,JPO&INPIT