Being the survey instrument which measures the property of the survey instrument, the image projection

摘要

PROBLEM TO BE SOLVED: To provide an apparatus capable of improving image quality in a plurality of focal depths.;SOLUTION: When using a scatterometer, different sections of a target region have different focal depths, respectively, and therefore, when measuring an entire region, a result of the measurement is partially out of a focus. In order to compensate this, a lens array is arranged in a back focal plane of a high numerical aperture lens.;COPYRIGHT: (C)2008,JPO&INPIT