APPARATUS, METHOD, AND TALBOT INTERFEROMETER FOR CALCULATING ABERRATION OF TEST OPTICAL SYSTEM

摘要

A calculation apparatus acquires image data of interference fringes detected by using a Talbot interferometer including a diffraction grating and a detector, retrieves a first wavefront by using the image data of the interference fringe, sets a value of a second wavefront incident on the diffraction grating, calculates an interference fringe image of a plurality of the diffracted light beams through simulation, and retrieves a third wavefront by using the calculated interference fringe image, wherein the third wavefront is retrieved by changing a position of the diffraction grating in a plane perpendicular to an optical axis of the Talbot interferometer, and aberration of a test optical system is calculated by reducing an error included in the first wavefront by using the second wavefront and the third wavefront.