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Semiconductor Device and Method of Forming Duplex Plated Bump-On-Lead Pad Over Substrate for Finer Pitch Between Adjacent Traces

机译:半导体器件和在衬底上形成双金属镀铅凸点焊盘的方法,以在相邻迹线之间形成更细的间距

摘要

A semiconductor device has a substrate. A first conductive layer is formed over the substrate. A duplex plated bump on lead pad is formed over the substrate. An insulating layer is formed over the first conductive layer and the substrate. A portion of the insulating over the duplex plated bump on lead pad is removed using a laser direct ablation process. The insulating layer is a lamination layer. The duplex plated bump on lead pad has a wide bump on lead pad. A semiconductor die is mounted over the substrate. The semiconductor die has a composite conductive interconnect structure. The semiconductor die has a first bump and a second bump with a pitch ranging from 90-150 micrometers between the first bump and the second bump. A duplex plated contact pad is formed on a surface of the substrate opposite the duplex plated bump-on-lead pad.
机译:半导体器件具有衬底。在衬底上方形成第一导电层。在衬底上方形成在引线垫上的双镀凸块。在第一导电层和基板上方形成绝缘层。使用激光直接烧蚀工艺可以去除引线垫上双工镀凸点上的部分绝缘层。绝缘层是层压层。引线垫上的双电镀凸块在引线垫上具有宽凸块。半导体管芯安装在衬底上方。半导体管芯具有复合导电互连结构。半导体管芯具有第一凸块和第二凸块,第一凸块和第二凸块之间的节距范围为90-150微米。在基板的与双面镀引线凸块相对的表面上形成双面镀接触垫。

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