Method For Preparing P-Type Zinc Oxide ZnO or P-Type ZnMgO

摘要

Method for preparing p-type zinc oxide ZnO or p-type ZnMgO, comprising at least the sequence of the following two steps a) and b):a) depositing silica, optionally doped with at least one doping element from column V of the periodic table of the elements, on a surface of an n-type ZnO or n-type ZnMgO substrate;b) annealing the substrate and the deposited silica at a sufficient temperature and for a sufficient time to induce exodiffusion of zinc from the ZnO or ZnMgO substrate to the silica, and the formation of zinc vacancies in at least one portion of the substrate adjacent to the silica; anda step for doping said portion of the substrate adjacent to the silica and comprising the zinc vacancies with at least one doping element from column V of the periodic table of the elements during step b) or at the conclusion of step b).