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METHODS FOR QUANTITATIVELY EVALUATING THE QUALITY OF DOUBLE PATTERNING TECHNOLOGY-COMPLIANT LAYOUTS
METHODS FOR QUANTITATIVELY EVALUATING THE QUALITY OF DOUBLE PATTERNING TECHNOLOGY-COMPLIANT LAYOUTS
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机译:定量评估符合双版画技术的版面质量的方法
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摘要
A method for fabricating an integrated circuit is disclosed that includes, in accordance with an embodiment, providing a double patterning technology-compliant logical design for the integrated circuit, the logical design including a plurality of elements; scoring the design of one or more of the plurality of elements to produce a design score; modifying the design based at least in part on the design score; generating a mask set implementing the modified logical design; and employing the mask set to implement the logical design in and on a semiconductor substrate.
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