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MICROELECTROMECHANICAL SENSOR WITH NON-CONDUCTIVE SENSING MASS, AND METHOD OF SENSING THROUGH A MICROELECTROMECHANICAL SENSOR
MICROELECTROMECHANICAL SENSOR WITH NON-CONDUCTIVE SENSING MASS, AND METHOD OF SENSING THROUGH A MICROELECTROMECHANICAL SENSOR
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机译:具有非导电感测质量的微机电传感器以及通过微机电传感器进行感测的方法
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摘要
A microelectromechanical sensor includes: a supporting structure, having at least one first electrode and one second electrode, which form a capacitor; and a sensing mass made of non-conductive material, which is arranged so as to interact with an electric field associated to the capacitor and is movable with respect to the supporting structure according to a degree of freedom so that a relative position of the sensing mass with respect to the first electrode and to the second electrode is variable in response to external stresses. The sensing mass is made of a material selected in the group consisting of: intrinsic semiconductor materials, oxides of semiconductor materials, and nitrides of semiconductor materials.
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